Spectroscopic ellipsometry
Woollam RC2-XI in Uppsala
The Woollam RC2-XI is documented for spectroscopic ellipsometry, with use described both alongside an ALD reactor and on an external measurement stage. Researchers should confirm the required configuration before planning measurements. A useful inquiry identifies the film stack and whether measurements are needed during processing or separately.
- Manufacturer
- Woollam
- Model
- RC2-XI
- Technique
- Spectroscopic ellipsometry
- Location
- Uppsala, Sweden
Questions to clarify for your project
- Do you need measurements during deposition or on a separate sample?
- What film stack and optical questions are involved?
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