Abstract

Ion beam etching

Scientific Vacuum Systems i6000 Milling System in Uppsala

The Scientific Vacuum Systems i6000 Milling System is an ion beam etcher. The facility describes material removal through argon-ion sputtering, with suitability depending on vacuum compatibility and the material. Researchers should discuss the intended removal and selectivity requirements before treating this as an alternative to a chemical etch process.

Manufacturer
Scientific Vacuum Systems
Model
i6000 Milling System
Technique
Ion beam etching
Location
Uppsala, Sweden

Questions to clarify for your project

  • Which materials need to be removed and retained?
  • What selectivity and surface-quality requirements matter?

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Scientific Vacuum Systems i6000 Milling System in Uppsala | Abstract