Electron beam lithography
NanoBeam Ltd. nB5 in Uppsala
The NanoBeam nB5 is documented for electron-beam patterning of chips and wafers. The facility describes CAD-based job preparation and several substrate-holder options. Researchers should establish how the design will be prepared and how the sample will be mounted before comparing exposure approaches or planning an experiment.
- Manufacturer
- NanoBeam Ltd.
- Model
- nB5
- Technique
- Electron beam lithography
- Location
- Uppsala, Sweden
Questions to clarify for your project
- Which CAD format and exposure pattern will you supply?
- Does the substrate need a standard or specially approved holder?
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