Abstract

Direct laser writing

Kloé Dilase 650 in Uppsala

The Kloé Dilase 650 is listed as a direct laser writer in the Uppsala facility catalogue. This is a starting point for discussing laser-written lithographic patterns. The public listing provides limited process detail, so Abstract does not infer supported resists, feature sizes or throughput from the model name.

Manufacturer
Kloé
Model
Dilase 650
Technique
Direct laser writing
Location
Uppsala, Sweden

Questions to clarify for your project

  • What pattern and substrate are you working with?
  • Which resist and feature requirements should the facility assess?

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Kloé Dilase 650 in Uppsala | Abstract